Modelling of Microfabrication Systems
Download or Read eBook Modelling of Microfabrication Systems PDF written by Raja Nassar and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 276 pages. Available in PDF, EPUB and Kindle.
| Author | : Raja Nassar |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 276 |
| Release | : 2013-03-09 |
| ISBN-10 | : 9783662087923 |
| ISBN-13 | : 3662087928 |
| Rating | : 4/5 (23 Downloads) |
Book Synopsis Modelling of Microfabrication Systems by : Raja Nassar
Book excerpt: This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
