Handbook of Silicon Semiconductor Metrology
Download or Read eBook Handbook of Silicon Semiconductor Metrology PDF written by Alain C. Diebold and published by CRC Press. This book was released on 2001-06-29 with total page 703 pages. Available in PDF, EPUB and Kindle.
| Author | : Alain C. Diebold |
| Publisher | : CRC Press |
| Total Pages | : 703 |
| Release | : 2001-06-29 |
| ISBN-10 | : 9780203904541 |
| ISBN-13 | : 0203904540 |
| Rating | : 4/5 (41 Downloads) |
Book Synopsis Handbook of Silicon Semiconductor Metrology by : Alain C. Diebold
Book excerpt: Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay
