Electron Microscopy of Semiconducting Materials and ULSI Devices
Download or Read eBook Electron Microscopy of Semiconducting Materials and ULSI Devices PDF written by Clive Hayzelden and published by . This book was released on 1998 with total page 296 pages. Available in PDF, EPUB and Kindle.
| Author | : Clive Hayzelden |
| Publisher | : |
| Total Pages | : 296 |
| Release | : 1998 |
| ISBN-10 | : UOM:39015041916985 |
| ISBN-13 | : |
| Rating | : 4/5 (85 Downloads) |
Book Synopsis Electron Microscopy of Semiconducting Materials and ULSI Devices by : Clive Hayzelden
Book excerpt: The first symposium on electron microscopy and materials for ultra-large scale integration (ULSI) at the Society's meeting attracted 34 papers by contributors from Asia, North America, and Europe. They cover specimen preparation and defect analysis in semiconductor devices; metallization, silicides, and diffusion barriers; the advanced characterization of ULSI structures, and semiconductor epitaxy and heterostructures. Annotation copyrighted by Book News, Inc., Portland, OR
