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Due to their speed, data density, and versatility, optical metrology tools play important roles in today's high-speed industrial manufacturing applications. Han
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Practical Optical Dimensional Metrology
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Provides basic explanations of the operation and application of the most common methods in the field and in commercial use. The first half of the book presents
Handbook of Optical Metrology
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The field of optical metrology offers a wealth of both practical and theoretical accomplishments, and can cite any number of academic papers recording such. How