In Situ Measurement of Growing Thin Films by Energy Dispersive X-Ray Reflectivity: Theory and Experimental Design
Download or Read eBook In Situ Measurement of Growing Thin Films by Energy Dispersive X-Ray Reflectivity: Theory and Experimental Design PDF written by and published by . This book was released on 2001 with total page 0 pages. Available in PDF, EPUB and Kindle.
| Author | : |
| Publisher | : |
| Total Pages | : 0 |
| Release | : 2001 |
| ISBN-10 | : OCLC:946232204 |
| ISBN-13 | : |
| Rating | : 4/5 (04 Downloads) |
Book Synopsis In Situ Measurement of Growing Thin Films by Energy Dispersive X-Ray Reflectivity: Theory and Experimental Design by :
Book excerpt: A method for the in-situ measurement of thin-film growth by x-ray reflectivity is described. Description of the underlying theory is given. Real-time characterization of thickness and roughness variation during growth is possible via this technique. A deposition chamber for the implementation of these measurements has been designed and constructed. This apparatus is described, along with software developed for the purpose of data acquisition and analysis.
