Interlayer Dielectrics for Semiconductor Technologies

Download or Read eBook Interlayer Dielectrics for Semiconductor Technologies PDF written by Shyam P Muraka and published by Elsevier. This book was released on 2003-10-13 with total page 459 pages. Available in PDF, EPUB and Kindle.
Interlayer Dielectrics for Semiconductor Technologies
Author :
Publisher : Elsevier
Total Pages : 459
Release :
ISBN-10 : 9780080521954
ISBN-13 : 0080521959
Rating : 4/5 (54 Downloads)

Book Synopsis Interlayer Dielectrics for Semiconductor Technologies by : Shyam P Muraka

Book excerpt: Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challenges. Interlayer Dielectrics for Semiconductor Technologies cover the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation, followed by the discussion of different materials including those with high dielctric constants and those useful for waveguide applications in optical communications on the chip and the package.* Brings together for the FIRST time the science and technology of interlayer deilectrics materials, in one volume* written by renowned experts in the field* Provides an up-to-date starting point in this young research field.


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