MEMS: A Practical Guide of Design, Analysis, and Applications
Download or Read eBook MEMS: A Practical Guide of Design, Analysis, and Applications PDF written by Jan Korvink and published by Springer Science & Business Media. This book was released on 2010-05-28 with total page 981 pages. Available in PDF, EPUB and Kindle.
| Author | : Jan Korvink |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 981 |
| Release | : 2010-05-28 |
| ISBN-10 | : 9783540336556 |
| ISBN-13 | : 3540336559 |
| Rating | : 4/5 (56 Downloads) |
Book Synopsis MEMS: A Practical Guide of Design, Analysis, and Applications by : Jan Korvink
Book excerpt: A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contribute to its eighteen chapters that encompass a wide range of innovative and varied applications. This publication goes beyond fabrication techniques covered by earlier books and fills a void created by a lack of industry standards. Subjects such as transducer operations and free-space microsystems are contained in its chapters. Satisfying a demand for literature on analysis and design of microsystems the book deals with a broad array of industrial applications. This will interest engineering and research scientists in industry and academia.
