Laser-Assisted Microtechnology
Download or Read eBook Laser-Assisted Microtechnology PDF written by Simeon M. Metev and published by Springer Science & Business Media. This book was released on 2013-03-08 with total page 283 pages. Available in PDF, EPUB and Kindle.
Author | : Simeon M. Metev |
Publisher | : Springer Science & Business Media |
Total Pages | : 283 |
Release | : 2013-03-08 |
ISBN-10 | : 9783642973277 |
ISBN-13 | : 3642973272 |
Rating | : 4/5 (77 Downloads) |
Book Synopsis Laser-Assisted Microtechnology by : Simeon M. Metev
Book excerpt: Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.