Multi-Wafer Rotating MEMS Machines
Download or Read eBook Multi-Wafer Rotating MEMS Machines PDF written by Jeffrey Lang and published by Springer Science & Business Media. This book was released on 2009-09-18 with total page 469 pages. Available in PDF, EPUB and Kindle.
| Author | : Jeffrey Lang |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 469 |
| Release | : 2009-09-18 |
| ISBN-10 | : 9780387777474 |
| ISBN-13 | : 0387777474 |
| Rating | : 4/5 (74 Downloads) |
Book Synopsis Multi-Wafer Rotating MEMS Machines by : Jeffrey Lang
Book excerpt: The collaboration and research that was developed to produce the MIT Gas Turbine Engine are described in this book. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. The book discusses the technical details that have gone into producing the engine and the overall systems-level tradeoffs, in particular its motor compressors and turbine generators, and the decisions that have been made.
