Techniques such as surface patterning have facilitated the emergence of advanced polymers with applications in areas such as microelectronics. Surface patternin

Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerfu

A comprehensive edited volume on important and up-to-date nanolithography techniques and applications. The book includes an introduction on the importance of na

Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at

MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials