This volume describes the increasing role of in situ optical diagnostics in thin film processing for applications ranging from fundamental science studies to pr

The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated wi

The objective of this workshop on optical thin films was to generate a list of basic research efforts which should be pursued in thin film processing techniques

As part of the DoD-MURI research program entitled 'Modeling and control of Advanced Chemical Vapor Deposition Processes: the Control of Defects in Mixed III-V C