Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
Download or Read eBook Physical Design and Mask Synthesis for Directed Self-Assembly Lithography PDF written by Seongbo Shim and published by Springer. This book was released on 2018-03-21 with total page 144 pages. Available in PDF, EPUB and Kindle.
| Author | : Seongbo Shim |
| Publisher | : Springer |
| Total Pages | : 144 |
| Release | : 2018-03-21 |
| ISBN-10 | : 9783319762944 |
| ISBN-13 | : 331976294X |
| Rating | : 4/5 (44 Downloads) |
Book Synopsis Physical Design and Mask Synthesis for Directed Self-Assembly Lithography by : Seongbo Shim
Book excerpt: This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.
