Physics and Technology of High-k Gate Dielectrics 6
Download or Read eBook Physics and Technology of High-k Gate Dielectrics 6 PDF written by S. Kar and published by The Electrochemical Society. This book was released on 2008-10 with total page 550 pages. Available in PDF, EPUB and Kindle.
| Author | : S. Kar |
| Publisher | : The Electrochemical Society |
| Total Pages | : 550 |
| Release | : 2008-10 |
| ISBN-10 | : 9781566776516 |
| ISBN-13 | : 1566776511 |
| Rating | : 4/5 (16 Downloads) |
Book Synopsis Physics and Technology of High-k Gate Dielectrics 6 by : S. Kar
Book excerpt: The issue covers in detail all aspects of the physics and the technology of high dielectric constant gate stacks, including high mobility substrates, novel and still higher permittivity dielectric materials, CMOS processing with high-K layers, metals for gate electrodes, interface issues, physical, chemical, and electrical characterization, gate stack reliability, and DRAM and non-volatile memories.
