Scanning Probe Lithography

Download or Read eBook Scanning Probe Lithography PDF written by Hyongsok T. Soh and published by Springer Science & Business Media. This book was released on 2013-03-14 with total page 212 pages. Available in PDF, EPUB and Kindle.
Scanning Probe Lithography
Author :
Publisher : Springer Science & Business Media
Total Pages : 212
Release :
ISBN-10 : 9781475733310
ISBN-13 : 1475733313
Rating : 4/5 (10 Downloads)

Book Synopsis Scanning Probe Lithography by : Hyongsok T. Soh

Book excerpt: Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample. SPL is capable of patterning sub-30nm features with nanometer-scale alignment registration. It is a relatively simple, inexpensive, reliable method for patterning nanometer-scale features on various substrates. It has potential applications for nanometer-scale research, for maskless semiconductor lithography, and for photomask patterning. The authors of this book have been key players in this exciting new field. Calvin Quate has been involved since the beginning in the early 1980s and leads the research time that is regarded as the foremost group in this field. Hyongsok Tom Soh and Kathryn Wilder Guarini have been the members of this group who, in the last few years, have brought about remarkable series of advances in SPM lithography. Some of these advances have been in the control of the tip which has allowed the scanning speed to be increased from mum/second to mm/second. Both non-contact and in-contact writing have been demonstrated as has controlled writing of sub-100 nm lines over large steps on the substrate surface. The engineering of a custom-designed MOSFET built into each microcantilever for individual current control is another notable achievement. Micromachined arrays of probes each with individual control have been demonstrated. One of the most intriguing new aspects is the use of directly-grown carbon nanotubes as robust, high-resolution emitters. In this book the authors concisely and authoritatively describe the historical context, the relevant inventions, and the prospects for eventual manufacturing use of this exciting new technology.


Scanning Probe Lithography Related Books

Scanning Probe Lithography
Language: en
Pages: 212
Authors: Hyongsok T. Soh
Categories: Technology & Engineering
Type: BOOK - Published: 2013-03-14 - Publisher: Springer Science & Business Media

DOWNLOAD EBOOK

Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that uses a sharp
Electrical Atomic Force Microscopy for Nanoelectronics
Language: en
Pages: 424
Authors: Umberto Celano
Categories: Science
Type: BOOK - Published: 2019-08-01 - Publisher: Springer

DOWNLOAD EBOOK

The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated
Nanofabrication
Language: en
Pages: 583
Authors: Ampere A. Tseng
Categories: Technology & Engineering
Type: BOOK - Published: 2008 - Publisher: World Scientific

DOWNLOAD EBOOK

Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at buildi
Materials and Processes for Next Generation Lithography
Language: en
Pages: 636
Authors:
Categories: Science
Type: BOOK - Published: 2016-11-08 - Publisher: Elsevier

DOWNLOAD EBOOK

As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist material
Scanning Probe Lithography
Language: en
Pages: 145
Authors: Yu Kyoung Ryu
Categories: Technology & Engineering
Type: BOOK - Published: 2022-12-22 - Publisher: CRC Press

DOWNLOAD EBOOK

The most complete book available on scanning probe lithography (SPL), this work details the modalities, mechanisms, and current technologies, applications, and