Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 10
Download or Read eBook Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 10 PDF written by R. Ekwal Sah and published by The Electrochemical Society. This book was released on 2009 with total page 871 pages. Available in PDF, EPUB and Kindle.
| Author | : R. Ekwal Sah |
| Publisher | : The Electrochemical Society |
| Total Pages | : 871 |
| Release | : 2009 |
| ISBN-10 | : 9781566777100 |
| ISBN-13 | : 1566777100 |
| Rating | : 4/5 (00 Downloads) |
Book Synopsis Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 10 by : R. Ekwal Sah
Book excerpt: The issue of ECS Transactions contains papers presented at the Tenth International Symposium on Silicon Nitride, Silicon Dioxide, and Alternate Emerging Dielectrics held in San Francisco on May 24-29, 2009. The papers address a very wide range of fabrication and characterization techniques, and applications of thin dielectric films in microelectronic and optoelectronic devices. More specific topics addressed by the papers include reliability, interface states, gate oxides, passivation, and dielctric breakdown.
