Spectroscopic Ellipsometry and Reflectometry
Download or Read eBook Spectroscopic Ellipsometry and Reflectometry PDF written by Harland G. Tompkins and published by Wiley-Interscience. This book was released on 1999-03-18 with total page 0 pages. Available in PDF, EPUB and Kindle.
Author | : Harland G. Tompkins |
Publisher | : Wiley-Interscience |
Total Pages | : 0 |
Release | : 1999-03-18 |
ISBN-10 | : 0471181722 |
ISBN-13 | : 9780471181729 |
Rating | : 4/5 (22 Downloads) |
Book Synopsis Spectroscopic Ellipsometry and Reflectometry by : Harland G. Tompkins
Book excerpt: While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.