Ultra-Clean Technology Handbook
Download or Read eBook Ultra-Clean Technology Handbook PDF written by Ohmi and published by Routledge. This book was released on 2017-11-01 with total page 948 pages. Available in PDF, EPUB and Kindle.
Author | : Ohmi |
Publisher | : Routledge |
Total Pages | : 948 |
Release | : 2017-11-01 |
ISBN-10 | : 9781351406420 |
ISBN-13 | : 1351406426 |
Rating | : 4/5 (20 Downloads) |
Book Synopsis Ultra-Clean Technology Handbook by : Ohmi
Book excerpt: Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules. The volume is divided int