Characterization in Silicon Processing
Download or Read eBook Characterization in Silicon Processing PDF written by Yale Strausser and published by Elsevier. This book was released on 2013-10-22 with total page 255 pages. Available in PDF, EPUB and Kindle.
| Author | : Yale Strausser |
| Publisher | : Elsevier |
| Total Pages | : 255 |
| Release | : 2013-10-22 |
| ISBN-10 | : 9780080523422 |
| ISBN-13 | : 0080523420 |
| Rating | : 4/5 (22 Downloads) |
Book Synopsis Characterization in Silicon Processing by : Yale Strausser
Book excerpt: This volume is devoted to the consideration of the use use of surface, thin film and interface characterization tools in support of silicon-based semiconductor processing. The approach taken is to consider each of the types of films used in silicon devices individually in its own chapter and to discuss typical problems seen throughout that films' history, including characterization tools which are most effectively used to clarifying and solving those problems.
