Chemical Mechanical Planarization in IC Device Manufacturing III
Download or Read eBook Chemical Mechanical Planarization in IC Device Manufacturing III PDF written by Robert Leon Opila and published by The Electrochemical Society. This book was released on 2000 with total page 664 pages. Available in PDF, EPUB and Kindle.
| Author | : Robert Leon Opila |
| Publisher | : The Electrochemical Society |
| Total Pages | : 664 |
| Release | : 2000 |
| ISBN-10 | : 1566772605 |
| ISBN-13 | : 9781566772600 |
| Rating | : 4/5 (05 Downloads) |
Book Synopsis Chemical Mechanical Planarization in IC Device Manufacturing III by : Robert Leon Opila
Book excerpt: This volume contains the proceedings of the third international symposium on Chemical Mechanical Planarization integrated circuit device manufacturing held at the 196th Meeting of the Electrochemical Society in Honolulu, Hawaii. ( October 20 -22 1999).
