Fabrication Engineering at the Micro and Nanoscale
Download or Read eBook Fabrication Engineering at the Micro and Nanoscale PDF written by Stephen A. Campbell and published by OUP USA. This book was released on 2008-01-10 with total page 0 pages. Available in PDF, EPUB and Kindle.
| Author | : Stephen A. Campbell |
| Publisher | : OUP USA |
| Total Pages | : 0 |
| Release | : 2008-01-10 |
| ISBN-10 | : 0195320174 |
| ISBN-13 | : 9780195320176 |
| Rating | : 4/5 (74 Downloads) |
Book Synopsis Fabrication Engineering at the Micro and Nanoscale by : Stephen A. Campbell
Book excerpt: Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication.
