Metal Impurities in Silicon-Device Fabrication
Download or Read eBook Metal Impurities in Silicon-Device Fabrication PDF written by Klaus Graff and published by Springer Science & Business Media. This book was released on 2013-03-08 with total page 228 pages. Available in PDF, EPUB and Kindle.
| Author | : Klaus Graff |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 228 |
| Release | : 2013-03-08 |
| ISBN-10 | : 9783642975936 |
| ISBN-13 | : 3642975933 |
| Rating | : 4/5 (36 Downloads) |
Book Synopsis Metal Impurities in Silicon-Device Fabrication by : Klaus Graff
Book excerpt: A discussion of the different mechanisms responsible for contamination together with a survey of their impact on device performance. The author examines the specific properties of main and rare impurities in silicon, as well as the detection methods and requirements in modern technology. Finally, impurity gettering is studied along with modern techniques to determine gettering efficiency. Throughout all of these subjects, the book presents only reliable and up-to-date data so as to provide a thorough review of recent scientific investigations.
