Reactive Sputter Deposition
Download or Read eBook Reactive Sputter Deposition PDF written by Diederik Depla and published by Springer Science & Business Media. This book was released on 2008-06-24 with total page 584 pages. Available in PDF, EPUB and Kindle.
| Author | : Diederik Depla |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 584 |
| Release | : 2008-06-24 |
| ISBN-10 | : 9783540766643 |
| ISBN-13 | : 3540766642 |
| Rating | : 4/5 (43 Downloads) |
Book Synopsis Reactive Sputter Deposition by : Diederik Depla
Book excerpt: In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with reactive magnetron sputtering, understand and investigate the technique, control their sputtering process and tune their existing process, obtaining the desired thin films.
