Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices
Download or Read eBook Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices PDF written by Eric Garfunkel and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 503 pages. Available in PDF, EPUB and Kindle.
| Author | : Eric Garfunkel |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 503 |
| Release | : 2012-12-06 |
| ISBN-10 | : 9789401150088 |
| ISBN-13 | : 9401150087 |
| Rating | : 4/5 (88 Downloads) |
Book Synopsis Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices by : Eric Garfunkel
Book excerpt: An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of Audience: Both expert scientists and engineers who wish to keep up with cutting edge research, and new students who wish to learn more about the exciting basic research issues relevant to next-generation device technology.
